・For UHP gas delivery in semiconductor and other clean industries
・Body material: 316L SS secondary remelt or 316L SS
・Electropolished wetted parts
・External metal seal construction

・For a wide variety of applications from semiconductor to general
・Body material of 316 SS or brass is available depending on the gas.

・For UHP gas delivery in semiconductor and other clean industries
・Used as a gas shutoff valve
・No spring is used for the wetted parts and the drive part is also separated from the diaphragm. Dead space in the flow path is small in order to suppress particle generation.

・Cleaned for high purity semiconductor applications and clean room assembled
・Helium leak tested
・SEMI Standards compliant
・User-friendly forged body

[Check valve]
・Fluid backflow is prevented by back pressure.
・Unique design with only one moving part in the gas stream, an O-ring
・Springless structure suppresses particle generation by vibration or chattering and pressure fluctuations on the downstream side

[Vacuum generator]
・Vacuum generation equipment
・Applicable to the exhaustion of unnecessary gas remaining inside the piping during gas cylinder replacement

[Flow switch]
・Detects excess flow above a given flow rate caused by pipe breakage, etc.

・Rc, R, and NPT connections have been added to the series.
・For a wide variety of applications from semiconductor to general
・Cleaned for O2 service
・Compact and lightweight due to the shortening of the actuator (AK3542/4542)
・M5 actuation port (AK3542/4542)
・Compact and lightweight due to the modifying of the knob design (AK3652/4652)
・The knob features a unique design that combines a scalloped round knob with a raised rectangular section to provide two choices of gripping. (AK3652/4652)

・For a wide variety of applications from semiconductor to general
・Compact and lightweight
　Weight: 0.52 kg, Height: 97.5 mm
・Minimum dead leg construction
・Various piping configurations are available:
　Select from compression, NPT female, or Rc thread.