・For air, medium vacuum, water
・Body material: Aluminum, Resin (PPS), Brass, Stainless steel
・With One-touch fittings (resin body)
・IP65
∗ The production of the VDW10/20 series was discontinued
in December 2012. Please select the new VDW10/20 series.
∗ Excludes the VDW10/20 series manifold
∗ The production of the VDW30 series was discontinued
in July 2015. Please select the VX21 series.
∗ The production of the 3-port solenoid valve VDW200/300 series
is continued.
・Compact, lightweight resin body (PPS)
・IP65
・Power consumption: 3 W (Standard), 0.5 W (With power-saving circuit)
・High-speed response ON: 0.45 ms, OFF: 0.4 ms (±0.05 ms)
・Long service life: 5 billion cycles or more
・High frequency: 1200 Hz
・Width: 9 mm
・Low power consumption: 4 W
・Compact
Overall length: Approx. 38 mm (2-port), 54 mm (3-port)
Valve width/height: 10 mm
Weight: 10 g (2-port), 20 g (3-port)
・Large flow rate
C [dm3/(s·bar)]: 0.25 (2-port), 0.5 (3-port)
Flow rate [L/min (ANR)]: 45 (2-port), 90 (3-port) (At 0.2 MPa)
・High-frequency operation is possible: High-speed response 7 ms or less (VQ20), 20 ms or less (VQ30)
・Easy piping with One-touch fittings
・The dust-tight, water-jet-proof enclosure (IP65) is compatible with the DIN terminal type.
・Applications: Air-blow, Blow-off of workpieces, etc.
・Manifold type no.: VV2Q22, VV2Q32
Product Number Check
・Increased impact force due to higher peak pressure
Drastic reduction in air consumption and labor time
High peak pressure: 3 times or more (Compared with the existing model)
Air consumption: 93% reduction
・Compact design allows for installation in narrow spaces.
・The peak pressure of repeatedly colliding air permits efficient blowing.
・Air consumption: Reduced by 50% or more
・Control for pulse generation is not required.
Pulse blow can be used by simply supplying air.
・Low particle generation, Oil-free, Metal-free * Fluid contact parts
・Isolated structure
The solenoid drive body is separated from the fluid area by a diaphragm.
・Power consumption: 1.0 W or less (With power saving circuit)
・Change in volume (Pumping volume): 0.01 µL or less
・Low particle generation, Oil-free, Metal-free
・Fluids: Air, Water, Deionized water, Diluent, Cleaning fluid
・Isolated structure: The solenoid drive body is separated from the fluid area by a block seal.
・Easy piping
・Minimal dead space
・Flow adjustment is not required.
・Highly resistant to contamination and reduces valve failures
・Applicable tubing:
Silicone, PharMed®BPT, Tygon®
・Power consumption: 2.0 W
・Compact: Valve width 20 mm
・Easy tubing replacement
・Cleaned for high purity semiconductor applications and clean room assembled
・Helium leak tested
・SEMI Standards compliant
・User-friendly forged body
・Minimum operating pressure: 1 × 10-6 Pa (abs)
・Leakage: Internal 1.3 × 10-9 Pa·m3/s, External 1.3 × 10-11 Pa·m3/s
・2 types of fittings and female threads are available.
・Power consumption: Max. 25% reduction
・Weight: Max. 18% lighter (0.5 kg → 0.41 kg)