・With this chiller, cooling water can be obtained anywhere it is necessary because
　of easy installation and easy operation.
・For a wide range of applications, such as laser machine tools, analytical equipment,
　LCD manufacturing equipment, mold temperature control, etc.
・Compact: W 377 x H 615 x D 500 mm, 40 kg (HRS012/018/024)
・Timer function, Low liquid level protection, Power failure auto-restart,
　Anti-freezing function, etc.
・Self diagnosis function
・Ideal for overseas models (Single-phase 200 to 230 VAC, Single-phase 100, 115 VAC)
・Compliant with UL Standards, CE-marking

・Supports low temperatures of up to −10°C
・Compact: Equivalent in size to the HRS040
・Cooling capacity: 1 kW (At −10°C)
・Temperature stability: ±0.1°C
・Set temperature range: −10°C to 40°C

・Resistant to dust and water splashing
・Protection of the electrical unit: IP54
・Metal panel
　The entire exterior surface is metal. 　A stainless steel panel can be selected. (Option)
・A large capacity tank (12 L) is available. (Option)
・Ambient temperature: 5 to 45°C

・Lightweight and compact
・Cooling capacity: 9 kW
・Temperature stability: ±0.5°C
・Set temperature range: 5 to 35°C
・Max. ambient temperature: 45°C
・Power supply: 3-phase 200 to 230 VAC, 380 to 415 VAC, 460 to 480VAC

・No heater is required, as the circulating fluid is heated using only the heat exhausted by the refrigerating circuit.
・Compatible with power supplies in Europe, Asia, Oceania, North, Central, and South America
・Low-noise design: 70 dB (A)
・Outdoor installation: IPX4
・Compact, Space saving

・3-phase 380 to 415 VAC (50 Hz), 3-phase 460 to 480 VAC (60 Hz)
・No heater is required, as the circulating fluid is heated using only the heat exhausted by the refrigerating circuit.
・Outdoor installation: IPX4
・Compact, Space saving

・Cooling capacity: 38 kW
・Power supply: 3-phase 380 to 415 VAC (50/60 Hz)
　 3-phase 460 to 480 VAC (60 Hz)
・Set temperature range: 5 to 35°C
・Max. ambient temperature: 45°C
・Temperature stability: ±0.1°C
・With heating function
・Immersion pump (Mechanical sealless)
・Waterproof specification: IPX4
・Touch panel, Improved usability and visibility

・Power consumption reduced by 53% 　Complete with energy-saving triple inverter!
・Cooling capacity: 9.5 kW (Air-cooled), 11.0 kW (Water-cooled)
・Temperature stability: ±0.1°C
・Set temperature range: 5°C to 40°C

・Complete with energy-saving triple inverter!
・Outdoor installation, Splashproof type (IPX4)
・Max. ambient temperature: 45℃
・Min. ambient temperature: –20℃ (For the air-cooled type)
・Temperature stability: ±0.1℃ (When a load is stable)
・Space saving and lightweight: 280 kg (25 kW type)
・Compliant with UL Standards, CE-marking

・Complete with energy-saving triple control!
　Reduces power consumption by 33%
・Compact and lightweight: 32 kg (100 VAC)
・Maintenance-free: Magnet pump
・Low-noise design: 55 dB (A)

・Temperatures for 2 fluid channel systems can be controlled individually by one chiller.
・Space saving, Reduced wiring
　Footprint: 22% reduction
　One power supply system for 2 channels
・Energy saving
　Power consumption reduced by 30% ・Touch panel
・Power supply: 3-phase 380 to 415 VAC (50/60 Hz)
　3-phase 460 to 480 VAC (60 Hz)

・The temperatures of 2 fluid channel systems can be controlled individually by 1 chiller.
・Space saving, Reduced wiring
　Footprint reduced by 21%
　One power supply system for 2 channels
・Energy saving
　Power consumption reduced by 17%

・Operable without the need to remove the unit from the rack
　Front access: Simple to control, service, and maintain with all filters and drainage accessible via the front panel
・Space saving: Multiple chillers can be mounted to a 19-inch rack.
・Cooling capacity: 1.1/1.2/1.8/2.4/3.0/5.1 kW (60 Hz)
・Temperature stability: ±0.1℃
・Global power supply:
　Single-phase 100 VAC (50/60 Hz)/115 VAC (60 Hz) 　Single-phase 200 to 230 VAC (50/60 Hz)

・More effective energy-saving is achieved through use of a DC inverter compressor and an inverter pump.
・Energy saving
　The inverter controls the number of motor rotations of the compressor and pump according to the load from the user’s application.
　Power consumption: Max. 65% reduction
　Facility water: Max. 67% reduction
・High performance
　Temperature stability: ±0.1°C (When a load is stable)
　Cooling time: Max. 46% reduction (SMC comparison)
・Refrigerant: R410A (HFC)/R448A (HFC/HFO)

・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
・Compliant with various safety standards
・Compliant with UL Standards, SEMI Standards, CE-marking

∗ The HRZ series will be discontinued in December 2022.
　Please select the HRZ-F series.

・In addition to the state-of-the-art functions of the HRZ series, these models employ a DC inverter compressor to achieve better energy efficiency.
・A wide temperature range and cooling capacity range are covered by one unit.
・Suited to the short innovation cycle of semiconductor equipment,
　Capable of responding flexibly to changes in the process conditions
・Compliant with UL Standards, SEMI Standards, CE-marking

∗ The HRZ series will be discontinued in December 2022.
　Please select the HRZ-F series.

・Direct heat exchanger for in-plant circulating fluid
・Can control the temperature over a wide range since a compressor is not required.
・Suitable for semiconductor processing equipment with a wide variety of features, such as high-temperature stability, a wide temperature range, failure diagnosis, external communication, etc.
・Compliant with UL Standards, SEMI Standards, CE-marking
・It is possible to select the inverter type.

・Compact, Space saving
・Refrigerant-free
・Low-noise design: 45 dBA (When selecting an option)
・Fluid contact material: Stainless steel, Resin (Aluminum and copper material-free)