・Applicable to 0603 chips
・Response speed: 13 msec (at the time of 500 mm*) /18.5 msec
　(at the time of 1000 mm*)
・Smooth workpiece removal with no overshoot
・There is no need for timing adjustment of switchback between vacuum
　and positive pressure.
・A throttle circuit is not required for release air.
・Suction filter: ZFC050 (Made to order)

* Distance from the unit to the work area

・2 built-in spool valves
・It is possible to control vacuum adsorption and release with a single valve unit.
・Width 10 mm (Same size as the SJ3000 series)
・With a restrictor that can adjust the flow rate of the release air
・Built-in replacement filter on both vacuum and release sides
・Can be combined with the 4 port solenoid valve SJ2000/3000 (Made to order)

・Vacuum suction and release can be controlled with a single valve.
・With a restrictor that can adjust the flow rate of the release air
・Can be mounted on the same manifold as the standard valve
　* When the individual EXH spacer is used